Applications of Porous Silicon as a Gas Sensor

Applications of Porous Silicon as a Gas Sensor

G. Di Francia¹, L. Quercia¹,G. Iadonisi², V. La Ferrara², L. Lancellotti², D. Ninno²,C. Baratto³,E. Comini³, G. Faglia³ and G. Sberveglieri³

^{1CR-ENEA Loc. Granatello, 80055 Portici(Napoli), Italy

^{2INFM,

Dip. di Scienze Fisiche, Università di Napoli "Federico II"

Mostra

d’Oltremare, Pad. 19, 80125 Napoli, Italy

^{3INFM

Dip. di Chimica e Fisica dei Materiali, Universita' di Brescia, Via Valotti 9, 25133

Brescia, Italy

Porous

Silicon has been the most investigated material over the last decade. The main aim of this

work is to describe its potential applications as gas sensor discussing reported data and

authors’ experimental findings. Fabrication methods and material properties as well

as the possible mechanisms of interaction with the environment are also discussed.}}}

Keywords: Sensor, Porous Silicon, Nanophase.